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The Hiden HPR-20 EPIC gas analysis system is configured for continuous analysis of gases and vapours at pressures near atmosphere in standard form, alternative inlet systems being offered for applications requiring direct sampling from higher pressures to 30 bar.

A sealed package gas analyser with integral package cracker for lamp gas analysis.

初期主要應(yīng)用于半導(dǎo)體行業(yè)的特氣檢測，如毒性氣體AsH3、B2H6、PH3等，強(qiáng)腐蝕性氣體如如HCI、HF、CIF3等，強(qiáng)氧化性氣體如CIF3、NF3等。 HPR-80腐蝕性氣體分析質(zhì)譜儀非常適用于分析腐蝕性氣體，HF，HCl，HBr和鹵代烴氣體工藝產(chǎn)生的反應(yīng)產(chǎn)物。

A system for discrete low volume sample analysis.

Software for evolved gas analysis.

Software for mass spectrometer control.